Comprehensive investigation of the impact of lateral charge migration on retention performance of planar and 3D SONOS devices

► Experimental evidence of lateral charge migration in planar device is shown. ► A 2D model able to reproduce the retention transients is developed. ► The model is applied to vertical cylindrical device to simulate retention. ► Disturbs to neighboring cells due to lateral charge migration is evaluated. ► Impact of the lateral migrated charge on the cell's string resistance is evaluated.