Frequency response reduced order model of primary resonance of electrostatically actuated MEMS circular plate resonators

This paper deals with the amplitude-frequency response of soft AC electrostatically actuated MEMS clamped circular plates. Alternating Current (AC) frequency is near half natural frequency of the plate. This results in primary resonance of the system. Two methods are used and compared, namely the Method of Multiple Scales (MMS), and Reduced Order Model (ROM). Both methods are in excellent agreement for amplitudes less than 0.4 of the gap. For amplitudes between 0.4 and 1 of the gap only seven terms ROM accurately predicts the behavior of the system. The effects of the voltage and damping parameters on the frequency response are reported.