3-Dimensional profile distortion measured by stylus type surface profilometer

In this paper, the distortion effect in measured profiles caused by stylus tip radius size of stylus-typed surface profilometer was analyzed in terms of 2D and 3D. On the basis of our analysis results, we propose selection criteria for the stylus tip radius to improve the reliability of measurement results. For this purpose, a simulation algorithm has been devised and implemented for 2D and 3D measurement simulations, and the 3-dimensional surface texture used in simulation was obtained using an Atomic Force Microscope (AFM) on an actual machined surface to improve the reliability of simulation results. The simulation results are compared with the measured results from the same specimen using a roughness tester, and the validity of analysis via the simulation proposed in this study is confirmed. Cumulative power spectral analysis was performed for the 2D and 3D simulated profiles obtained from simulation. On the basis of the analysis results, an effective frequency components field using a stylus type profilometer is clarified, and the selection criteria of the stylus tip radius for measurement is proposed considering the surface texture characteristics of the specimen. The purpose of this paper is to provide a basis of a simple and effective method which could be an alternative of some engineering standard that specifies selection of stylus tip radius for the measurement using only nominal Rq for machined surface.

► This paper demonstrates that 3D analysis is needed.
► Unlike many earlier papers this one does not rely solely on simulation.
► The original profiles were obtained by stitching together AFM images.
► Simulations were performed on good estimate of the true profile.
► Comparison of 3D simulation results and experimental results by stylus profiler.