Enhancing life cycles of total pressure vacuum gauges in deposition applications (enhancing life cycles of vacuum gauges)

The application of hot cathode ionisation gauges in vacuum deposition processes (PVD, CVD) is critical regarding durability of the sensors, due to the inherent risk of contamination and discharges. Unstable calibration after relatively short periods of operation is an often reported problem, which arises from contamination with film forming substances contained in the residual gas. Furthermore, contamination often lead to early gauge drop outs and consequently to unsatisfyingly short life cycles of the gauges. Research was conducted to obtain improved solutions for prevention of gauge contamination on the one side, as well as optimised sensor designs for improved robustness and insensitivity against contaminants on the other side. This contribution discusses approaches for the desired improvements by evaluating the effectiveness of system-based methods to reduce the exposure of the sensor to contaminations, by indicating interactions between those system-based means and gauges, and by indicating options for improving gauge durability.

► Optimised hot cathode gauges and operating conditions for deposition applications.
► Evaluation of different means for external gauge protection.
► Optimised baffle design based on deflective lamellae planes.