Ozone sensors on the base of SnO2 films deposited by spray pyrolysis

The gas-sensing properties of SnO2-based thin films designed for ozone detection are discussed in this paper. The influence of film characteristics on sensor performance is analyzed. SnO2 films with thickness 30–200 nm were deposited by spray pyrolysis. The SnO2 films have a response to ozone that is quantitative and rapid and sufficient for use in ozone control and monitoring applications. Sensor performance is compared with similarly prepared sensors fabricated from In2O3- and WO3-based films. The mechanism of the processes controlling the sensor response characteristics is proposed. The data support our conclusion that the reaction with ozone using the SnO2-film sensors is limited by the adsorption/desorption processes.