کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
748563 1462254 2012 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Vertical-Channel STacked ARray (VCSTAR) for 3D NAND flash memory
موضوعات مرتبط
مهندسی و علوم پایه سایر رشته های مهندسی مهندسی برق و الکترونیک
پیش نمایش صفحه اول مقاله
Vertical-Channel STacked ARray (VCSTAR) for 3D NAND flash memory
چکیده انگلیسی

A novel three-dimensional (3D) NAND flash memory, VCSTAR (Vertical-Channel STacked ARray), is investigated. The proposed device is a vertical channel structure having stacked word-lines to achieve high memory density without shrinking cell channel length. The VCSTAR, by using an ultra-thin body structure, can reduce the off-current level, and planar cell of VCSTAR assures insensitivity to process variables such as etch-slope. The performance of designed structure is described and the optimization of device parameter is performed by using TCAD simulation. To increase device performance and ease of fabrication, the modified fabrication method to reduce the spacing between gates is also introduced.


► A novel three-dimensional (3D) NAND flash memory is investigated.
► The proposed device is a vertical channel structure having stacked word-lines.
► A high memory density without shrinking cell channel length is achieved.
► Optimization of device parameter is performed by using TCAD simulation.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Solid-State Electronics - Volume 78, December 2012, Pages 34–38
نویسندگان
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