کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
749510 1462270 2006 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Investigation of oxygen annealing effects on RF sputter deposited SiC thin films
موضوعات مرتبط
مهندسی و علوم پایه سایر رشته های مهندسی مهندسی برق و الکترونیک
پیش نمایش صفحه اول مقاله
Investigation of oxygen annealing effects on RF sputter deposited SiC thin films
چکیده انگلیسی

Amorphous silicon carbide films were deposited by RF sputtering technique using a SiC target. These films were annealed in dry oxygen ambient in the temperature range of 400–700 °C. Subsequently the films were characterized using X-ray photoelectron spectroscopy (XPS) to investigate the chemical composition at each annealing temperature. XPS indicated that increasing the anneal temperature results in a decrease in SiC phase, and an increase in SiOx. Surface morphology of the oxidized films was characterized using atomic force microscope. Optical absorption studies indicated blue shifting effects as the annealing temperature was increased.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Solid-State Electronics - Volume 50, Issues 7–8, July–August 2006, Pages 1189–1193
نویسندگان
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