کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
749807 | 894850 | 2006 | 5 صفحه PDF | دانلود رایگان |
In this paper, a polycrystalline Si thin film transistor (TFT) with self-aligned silicide Schottky barrier source/drain (SSD), high-κ gate dielectric and metal gate electrode is demonstrated using a simplified low temperature process. After crystallization of α-Si, the thermal budget for device fabrication is reduced to ∼420 °C due to elimination of the implant doping and subsequent activation annealing procedures. P-channel SSD-TFT with PtSi S/D shows an acceptable electrical performance with Ion of 1.5 μA/μm for the Lg = 2.5 μm device at Vgs = Vds = −5 V and Ion/Ioff ratio of ∼104. However, Ion of the n-channel SSD-TFT with DySi2−x S/D is about two orders of magnitude smaller due to the relatively high Schottky barrier height and poor silicide quality of the DySi2−x/poly-Si contact.
Journal: Solid-State Electronics - Volume 50, Issue 2, February 2006, Pages 232–236