کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
753003 1462264 2012 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Point defect determination by eliminating frequency dispersion in C–V measurement for AlGaN/GaN heterostructure
موضوعات مرتبط
مهندسی و علوم پایه سایر رشته های مهندسی مهندسی برق و الکترونیک
پیش نمایش صفحه اول مقاله
Point defect determination by eliminating frequency dispersion in C–V measurement for AlGaN/GaN heterostructure
چکیده انگلیسی

In this paper, an improved small-signal equivalent model is introduced to eliminate frequency dispersion phenomenon in capacitance–voltage (C–V) measurement, and a new mathematic method is proposed to calculate the amount of bulk defect existing in the GaN buffer layer. Compared with photoluminescence (PL) and high resolution X-ray diffraction (HRXRD) data, it is identified that the main component of the bulk defect concentration is made up of the point defect concentration, rather than the edge dislocation concentration. All these results prove the accuracy of the improved C–V model and feasibility of the mathematic model.


► An improved capacitance–voltage model to eliminate frequency dispersion phenomenon.
► A mathematic model to rule out the effect of surface state and interface state.
► An accurate calculation of the amount of bulk defect.
► Compared with PL and HRXRD data, it reveals that point defect dominates bulk defect.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Solid-State Electronics - Volume 68, February 2012, Pages 98–102
نویسندگان
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