کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
7541311 1489046 2018 10 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Impact of integrating equipment health in production scheduling for semiconductor fabrication
ترجمه فارسی عنوان
تأثیر سلامت تجهیزات در برنامه ریزی تولید برای ساخت نیمه هادی
کلمات کلیدی
شاخص سلامت تجهیزات، برنامه ریزی خطی زنجیره ای مختلط، برنامه ریزی، تولید نیمه هادی،
موضوعات مرتبط
مهندسی و علوم پایه سایر رشته های مهندسی مهندسی صنعتی و تولید
چکیده انگلیسی
Monitoring the Equipment Health Indicator (EHI) of critical machines helps effectively to maintain process quality and reduce wafer scrap, rework, and machine breakdowns. To model and illustrate the integration of EHI in scheduling decisions to balance between productivity and quality risk, this paper presents two mixed integer linear programs to schedule jobs on heterogeneous parallel batching machines. The capability of a machine to process a job is categorized as preferred, acceptable, and unfavorable based on the job requirements. The quality risk of processing a job by a machine is a function of its EHI and the capability level of the machine for the job, which is modeled as a penalty in the objective function of trading-off between productivity and quality risk. The first model is static and assumes constant EHI of machines on the scheduling horizon, whereas the second model considers the EHI dynamics, i.e., the machine condition deteriorates over time based on the scheduled jobs. Numerical experiments indicate the potential applications of using EHI-integrated scheduling approaches to analyze and optimize the trade-off between productivity and quality risk.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Computers & Industrial Engineering - Volume 120, June 2018, Pages 450-459
نویسندگان
, , , ,