کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
7706175 | 1497306 | 2018 | 8 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Investigation of PdCuSi metallic glass film for hysteresis-free and fast response capacitive MEMS hydrogen sensors
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
الکتروشیمی
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Investigation of PdCuSi metallic glass film for hysteresis-free and fast response capacitive MEMS hydrogen sensors Investigation of PdCuSi metallic glass film for hysteresis-free and fast response capacitive MEMS hydrogen sensors](/preview/png/7706175.png)
چکیده انگلیسی
In this study, we investigated PdCuSi metallic glass (MG) as a sensing material for capacitive MEMS hydrogen sensors. We first confirmed by film analysis that the fabricated PdCuSi film was MG and that it had a trigonal prism cluster. The measured pressure-composition-temperature curve of PdCuSi MG exhibited no hysteresis during hydrogen absorption and desorption. The response time was found to become faster by two orders of magnitudes compared with that of Pd polycrystal. These properties were attributed to the trigonal prism clusters. Strain was evaluated in the low hydrogen concentration regime of 0.05Â vol% to 4.0Â vol%, and the strain of PdCuSi MG was found to follow Sieverts' law well, indicating that hydrogen is present in the MG in a diffuse state. The hydrogen-concentration dependence of a capacitive MEMS hydrogen sensor was measured and hysteresis-free characteristics were obtained, implying advantages in hydrogen leak detection applications.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: International Journal of Hydrogen Energy - Volume 43, Issue 19, 10 May 2018, Pages 9438-9445
Journal: International Journal of Hydrogen Energy - Volume 43, Issue 19, 10 May 2018, Pages 9438-9445
نویسندگان
Yumi Hayashi, Hiroaki Yamazaki, Daiki Ono, Kei Masunishi, Tamio Ikehashi,