کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
7729426 | 1497925 | 2016 | 6 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Radio frequency magnetron sputtering of Li7La3Zr2O12 thin films for solid-state batteries
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
الکتروشیمی
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Radio frequency magnetron sputtering of Li7La3Zr2O12 thin films for solid-state batteries Radio frequency magnetron sputtering of Li7La3Zr2O12 thin films for solid-state batteries](/preview/png/7729426.png)
چکیده انگلیسی
Thin film batteries based on solid electrolytes having a garnet-structure like Li7La3Zr2O12 (LLZ) are considered as one option for safer batteries with increased power density. In this work we show the deposition of Ta- and Al-substituted LLZ thin films on stainless steel substrates by r.f. magnetron sputtering. The thin films were characterized by XRD, SEM and time-of-flight-secondary ion mass spectrometry (ToF-SIMS) to determine crystal structure, morphology and element distribution. The substrate temperature was identified to be one important parameter for the formation of cubic garnet-structured LLZ thin films. LLZ formation starts at around 650 °C. Single phase cubic thin films were obtained at substrate temperatures of 700 °C and higher. At these temperatures an interlayer is formed. Combination of SEM, ToF-SIMS and XRD indicated that this layer consists of γ-LiAlO2. The combined total ionic conductivity of the γ-LiAlO2 interlayer and the LLZ thin film (perpendicular to the plane) was determined to be 2.0 Ã 10â9 S cmâ1 for the sample deposited at 700 °C. In-plane measurements showed a room temperature conductivity of 1.2 Ã 10â4 S cmâ1 with an activation energy of 0.47 eV for the LLZ thin film.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of Power Sources - Volume 307, 1 March 2016, Pages 684-689
Journal: Journal of Power Sources - Volume 307, 1 March 2016, Pages 684-689
نویسندگان
S. Lobe, C. Dellen, M. Finsterbusch, H.-G. Gehrke, D. Sebold, C.-L. Tsai, S. Uhlenbruck, O. Guillon,