کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
7737766 | 1497980 | 2014 | 9 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Fabrication of a symmetric micro supercapacitor based on tubular ruthenium oxide on silicon 3D microstructures
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
الکتروشیمی
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
A micro-supercapacitor with a three-dimensional configuration has been fabricated using an ICP etching technique. Hydrous ruthenium oxide with a tubular morphology is successfully synthesized using a cathodic deposition technique with a Si micro prominence as a template. The desired tubular RuO2·xH2O architecture facilitates electrolyte penetration and proton exchange/diffusion. A single MEMS electrode is studied using cyclic voltammetry, and a specific capacitance of 99.3 mF cmâ2 and 70 F gâ1 is presented at 5 mV sâ1 in neutral Na2SO4 solution. The accelerated cycle life is tested at 80 mV sâ1, and satisfactory cyclability is observed. When placed on a chip, the symmetric cell exhibits good supercapacitor properties, and a specific capacitance as high as 23 mF cmâ2 is achieved at 10 mA cmâ2. Therefore, 3D MEMS microelectrode arrays with electrochemically deposited ruthenium oxide films are promising candidates for on-chip electrochemical micro-capacitor applications.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of Power Sources - Volume 252, 15 April 2014, Pages 64-72
Journal: Journal of Power Sources - Volume 252, 15 April 2014, Pages 64-72
نویسندگان
Xiaofeng Wang, Yajiang Yin, Xiangyu Li, Zheng You,