A high efficient micro-proton exchange membrane fuel cell by integrating micro-nano synergical structures

► We fabricated a silicon-based micro-PEMFC performing an outstanding efficiency. ► The catalyst utilization ratio is superior to the currently reported micro-PEMFCs. ► The remarkable performance was due to the combination of three mechanisms. ► Enhanced reaction area, cell strength and cathodic efficiency are the mechanisms. ► We employed SEM, TEM, CV, EIS and Polarization Curves to verify the mechanisms.