Synthesis of hafnium(IV) β-ketoiminates as potential precursors for the MOCVD of HfO2

► We report the first hafnium(IV) complex employing a β-ketoiminato ligand system. ► We report the volatility and sublimation enthalpy of two hafnium(IV) complexes. ► Reported compound volatilities are greater than other known metal acetylacetonates. ► We report the differing fluxional behavior of the compounds using NMR spectroscopy.