Si-C-N-Fe nanostuctured ceramics from inorganic polymer precursors obtained by plasma polymerization

The conversion process of the polymer precursors into a nanostructured ceramic was followed mainly by FTIR, XRD, TEM and SEM investigation. Infrared spectroscopy of polymers revealed the presence of Si-C, Si-N, C-N and hydrogenated bonds. Transmission electron microscopy showed that the polymers are made of nanometric round-shape particles with the average particle size around 20-40 nm for SiCN and 40-80 nm for SiCN containing iron.