Investigation of structure, adhesion strength, wear performance and corrosion behavior of platinum/ruthenium/nitrogen doped diamond-like carbon thin films with respect to film thickness

▶ Sputtered PtRuN-DLC thin films were fabricated with different film thicknesses. ▶ The graphitization of the films increased with increased film thickness. ▶ The wear resistance of the films increased though their adhesion strength decreased. ▶ The corrosion potentials of the films shifted to more negative values. ▶ However, the corrosion currents of the films decreased.