Hysteresis compensation of piezoelectric deformable mirror based on Prandtl-Ishlinskii model

Hysteresis of piezoelectric deformable mirror (DM) reduces the closed-loop bandwidth and the open-loop correction accuracy of adaptive optics (AO) systems. In this work, a classical Prandtl-Ishlinskii (PI) model is employed to model the hysteresis behavior of a unimorph DM with 20 actuators. A modified control algorithm combined with the inverse PI model is developed for piezoelectric DMs. With the help of PI model, the hysteresis of the DM was reduced effectively from about 9% to 1%. Furthermore, open-loop regenerations of low-order aberrations with or without hysteresis compensation were carried out. The experimental results demonstrate that the regeneration accuracy with PI model compensation is significantly improved.