Effect of Hydrogen ion beam irradiation onto the FIR reflectivity of pulsed laser deposited mirror like Tungsten films

► Mirror like W thin films were obtained via PLD. ► The maximum thickness of the Tungsten thin film was ∼324 nm. ► Effect of H-ion beam irradiation on the quality of PLD W mirror is reported. ► Post exposure reflectivity of Tungsten thin films was hardly changed by 2 %.