APCVD prepared TiNxOy films with energy-saving and self-cleaning functions

In this study, titanium oxynitride (TiNxOy) films were assessed for their potential as energy saving and self-cleaning coatings on window glass. The coatings were obtained through heat treatment of titanium nitride (TiN) films deposited by atmospheric pressure chemical vapor deposition (APCVD). The effects of heat treatment temperature on the properties of the films such as chemical composition, structure, surface morphology, sheet resistance, optical absorption, transmittance, reflectance and self-cleaning performance were investigated. Oxygen content of films increased with increasing the heat treatment temperature, and anatase TiO2 crystalline formed in the films. Hence, the transmittance in the visible light region of the films was well improved, though the electrical conductivity and reflectance in the near infrared region decreased slightly. The results also showed that the treated films exhibited excellent hydrophilic property and gained photocatalytic property. It reveals that after heat treatment at relatively low temperature, such as 450 °C, TiN film turned into TiNxOy film and achieved self-cleaning properties, while energy saving property was remained as well.