کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
7992736 | 1516149 | 2018 | 7 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Band alignments of SiO2 and HfO2 dielectrics with (AlxGa1-x)2O3 film (0â¤xâ¤0.53) grown on Ga2O3 buffer layer on sapphire
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فلزات و آلیاژها
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
We report the band alignment of SiO2 and HfO2 with (AlxGa1-x)2O3 (0â¯â¤â¯xâ¯â¤â¯0.53) film utilizing the high resolution X-ray photoelectron spectroscopy (XPS) measurements. (AlxGa1-x)2O3 film were epitaxially grown on sapphire with Ga2O3 buffer layer. The crystal quality and orientation of (AlxGa1-x)2O3 (0â¯â¤â¯xâ¯â¤â¯0.53) samples were firstly studied with high-resolution X-ray diffraction (HRXRD). Ga 2p, Si 2p, Hf 4f and valence band spectra were used to determine the band alignment. As the Al mole fraction x increases from 0 to 0.53, conduction band alignments of SiO2/(AlxGa1-x)2O3 and HfO2/(AlxGa1-x)2O3 increase from 1.9 to 2.6â¯eV and from 1.1 to 2.0â¯eV, with the valence band alignment decrease from 1.9 to 0.6â¯eV and from â0.2 to â1.7â¯eV, respectively. From the results that wider bandgap with a larger conduction band alignment, reflects that Ga2O3 and (AlxGa1-x)2O3 is a promising candidate for power devices.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of Alloys and Compounds - Volume 745, 15 May 2018, Pages 292-298
Journal: Journal of Alloys and Compounds - Volume 745, 15 May 2018, Pages 292-298
نویسندگان
Zhaoqing Feng, Qian Feng, Jincheng Zhang, Chunfu Zhang, Hong Zhou, Xiang Li, Lu Huang, Lei Xu, Yuan Hu, Shengjie Zhao, Yue Hao,