Fabrication of Co90Zr10 thin films with adjustable resonance frequency from 1.8 to 7.1Â GHz

A series of Co90Zr10 thin films deposited at different oblique angles from 10° to 70° was prepared by radio frequency magnetron sputtering. The static magnetic properties and high frequency characteristics were investigated by measuring the hysteresis loops and microwave permeability spectra. The static magnetic results revealed that Co90Zr10 thin films prepared by oblique sputtering possessed a well-defined in-plane uniaxial magnetic anisotropy. It is found that the in-plane uniaxial magnetic anisotropy increased with the increasing oblique angle with a peak at 55° and then dropped rapidly above this angle. This behavior was qualitatively explained to be a result of the microstructure due to self-shadowing effect. Continuous modification of the resonance frequency in the range of 1.82-7.13 GHz has been achieved, which is essential in high frequency applications of soft magnetic thin films.