Thermal stability and dynamic magnetic properties of FeSiAl films fabricated by oblique deposition

In this study, the temperature dependence of the permeability spectra in range from 303 K to 423 K of FeSiAl thin films fabricated by oblique deposition are carried out. The resonance frequency is found to increase from 1.6 GHz to 2.9 GHz at room temperature with the oblique deposition angle changed from 18.4° to 45°. It is attributed to the increase of the magnetic anisotropy. The thermal stability of the resonance frequency and dynamic anisotropy are found to be within 15% in the temperature range from 303 K to 423 K. In addition, the behavior of the static and dynamic permeabilities, effective Gilbert damping factor, and frequency line width with temperature for FeSiAl films with different oblique deposition angles are presented and discussed in detail.