Surface morphology and depth profile study of Cd1−xZnxTe alloy nanostructures

► Cd1−xZnxTe (CZT) films were grown on heated glass at 400 °C from a single target. ► CZT films were annealed at 300 and 450 °C for 1 h under N2 gas at atm. pressure. ► The structural and optical properties of CZT films were studied. ► Better structural stability and reproducibility in CZT films were succeeded. ► Uniform and stoichiometric CZT films with required compositions were fabricated.