Basic characteristics of a multilayer thin electrostatic actuator supported by lubricating oil for a fine-motion stage

► We design and constructed a multilayer thin electrostatic actuator having a simple structure for high-precision motion. ► Lubricating oil is used to support the mover, which is constructed of thin electrodes, and to reduce the friction between the mover and stator layers without the need for precise ball bearings. ► The effect of the viscosity of the lubricating oil on the displacement and force characteristics were examined in order to clarify the suitable lubricating oil characteristics. ► A suitable driving signal for the electrostatic actuator supported by lubricating oil was investigated experimentally. ► Control systems for the electrostatic actuator using suitable driving signals were designed in order to examine the effectiveness of the actuator.