Electrohydrodynamic direct-writing ZnO nanofibers for device applications

Interest towards adapting and developing nanofiber technology for device applications has been expanded in recent years. Here, we describe the use of electrohydrodynamic direct-writing (EDW) for the precise deposition of orderly functional nanofibers as relevant device architectures. Individual ZnO nanofibers can be obtained and assembled into complex patterns via EDW and subsequent thermal treatment. Grid arrays consisting of ZnO nanofibers were fabricated on a flat silicon substrate by controlling the trajectory of substrate. Furthermore, the precise deposition of ZnO nanofibers on three-dimensional silicon substrates including microbeams and pillars was demonstrated, illustrating the integration capability with MEMS structures and device platforms. A single ZnO nanofiber field-effect transistor was also fabricated and characterized. Our results show promise for EDW as a potential method to fabricate micro/nanodevices, especially electronics in nanoscale.