The role of the nitrogen flow rate on the transport properties of CrN thin films produced by DC magnetron sputtering

The role of the nitrogen flow rate on the transport properties of CrN thin films produced by DC magnetron sputtering

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Surface and Coatings Technology - Volume 334, 25 January 2018, Pages 98-104

A. Garzon-Fontecha, H.A. Castillo, E. Restrepo-Parra, W. De La Cruz,