Approximate linear relation between reduced modulus and stiffness in completely amorphous Si-C-N films

An approximately linear relation between reduced modulus (Er) and stiffness (S) was observed based on the characterization of completely amorphous Si-C-N hard films by means of nanoindentation. This linear relation was verified by a series of amorphous Si-C-N films prepared under different experimental conditions. Furthermore the linear relation can be extended to amorphous Si-B-C-N film systems. This finding provides one possible way to evaluate the hardness and reduced modulus of a material without involving the contact area.