کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
8029374 | 1517643 | 2013 | 6 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
HiPIMS deposition of TiOx in an industrial-scale apparatus: Effects of target size and deposition geometry on hysteresis
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
High power impulse magnetron sputtering (HiPIMS) has proven its potential for improvement of properties of deposited coatings. Yet, up-scaling of processes into large industrial-scale systems needs investigation. Hereby we report reactive HiPIMS of titanium dioxide thin films carried out in a cubic meter large deposition chamber using a 30.5Â ÃÂ 12.5Â cm2 titanium target sputtered in Ar/O2 gas atmosphere. The effect of the pulsing frequency at constant average power (2Â kW) has been studied. A significant reduction of hysteresis was observed for pulsing frequencies as low as 200Â Hz, confirming previous studies. Finally, data from X-ray diffraction indicate that the phase constitution of the HiPIMS-deposited coatings evolves from an anatase/rutile mixture to rutile as the pulse frequency is decreased.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Surface and Coatings Technology - Volume 235, 25 November 2013, Pages 714-719
Journal: Surface and Coatings Technology - Volume 235, 25 November 2013, Pages 714-719
نویسندگان
Alessandro Surpi, Tomas Kubart, Diego Giordani, Martino Tosello, Giovanni Mattei, Marino Colasuonno, Alessandro Patelli,