Optical properties of ZnO thin films grown on glass substrates using catalytically generated high-temperature H2O

► ZnO films were grown by CVD using reaction of high-energy H2O and dimethylzinc gas. ► Films were grown on glass substrates in the temperature range 573-873 K. ► Optical properties were evaluated using transmittance and PL spectroscopy. ► Optical properties were superior to those of films grown by conventional MOCVD.