Influence of electrodeposition parameters on the characteristics of NiMoP film

► NiMoP alloys were electrodeposited from aqueous citrate-ammonium electrolytes. ► NiMoP deposits at a 0.122 [MoO42 −]/Ni2 + ratio show a very good adherence and uniformity. ► Relatively high corrosion resistance, low resistivity and high stability against oxidation for sizes of crystallites. ► NiMoP alloy is elected for use as a low-resistivity diffusion barrier layer.