Chemical and mechanical characterization of TiO2/Al2O3 atomic layer depositions on AISI 316 L stainless steel

► ALD mono/bi/multilayers of Al2O3 and TiO2 were successfully deposited on 316 Stainless Steel. ► GDOES results gave information about composition and thickness of the different ALD layers. ► Corrosion resistance was strongly enhanced by ALD application. ► Multilayer ALD configurations proved to be more protective compared to single layers.