Surface morphology evolution and properties of silicon coating on silicon carbide ceramics by advanced plasma source ion plating

► We prepare Si coatings on SiC ceramics by advanced plasma source ion plating. ► We examine surface morphology and properties varying deposition parameters. ► Slowing down deposition rate will lead to smooth surface without notches. ► Rising substrate temperature will significantly improve optical reflectance. ► We reveal contributions of residual stress and substrate temperature to reflectance.