Influence of Zr and O on the structure and properties of TiC(N) coatings deposited by magnetron sputtering of composite TiC0.5Â +Â ZrO2 and (Ti, Zr)C0.5Â +Â ZrO2 targets

► Hard TiZrCON coatings for tribological applications up to 600 °C. ► Alloying with Zr enhances mechanical and tribological properties of TiCON coatings. ► TiZrCO(N) coatings exhibit a peak hardness versus nitrogen partial pressure. ► TiZrCON coatings with high Zr content are the most wear resistant at 25 − 300 °C. ► Zr-doped TiCON coatings show good oxidation resistance up to 600 °C.