Magnetron sputtered Hf-B-Si-C-N films with controlled electrical conductivity and optical transparency, and with ultrahigh oxidation resistance
Keywords: مقاومت در برابر اکسیداسیون در دمای بالا; Hf-B-Si-C-N films; Pulsed reactive magnetron sputtering; Electrical conductivity; Optical transparency; High-temperature oxidation resistance;