Preparation and characterization of ZrB2/AlN multilayers by N+ beam assisted deposition

► ZrB2/AlN superlattice has prices and compete on quality in protective coatings. ► N+ bombardment gives a significant contribution to its application. ► There are a critical modulation period and ratio for the hardest multilayer. ► The effects are related to interfacial stress field and layer nonacrystalline.