کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
8038283 1518332 2014 8 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Enhanced contrast separation in scanning electron microscopes via a suspended-thin sample approach
ترجمه فارسی عنوان
جداسازی کنتراست پیشرفته در میکروسکوپ الکترونی اسکن از طریق روش نمونه گیری نازک معلق
کلمات کلیدی
نمونه نازک معلق، تصویربرداری کنتراست، الکترون ثانویه، الکترون القایی میکروسکوپ الکترونی اسکن،
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد فناوری نانو (نانو تکنولوژی)
چکیده انگلیسی
A suspended-thin-sample (STS) approach for signal selection and contrast separation is developed in scanning electron microscopes with commonly used primary beam energies and traditional detectors. Topography contrast, electron channeling contrast and composition contrast are separated and largely enhanced from suspended thin samples of several hundred nanometers in thickness, which is less than the escape depth of backscattered electrons. This imaging technique enables to detect relatively pure secondary electron and elastic backscattered electron singles, whereas suppress multiple inelastic scattering effects. The provided contrast features are different from those of bulk samples, which are largely mixed with inelastic scattering effects. The STS imaging concept and method could be expected to have more applications in distinguishing materials of nanostructures, multilayers, compounds and composites, as well as in SEM-based electron backscatter diffraction, cathodoluminesence, and x-ray microanalysis.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Ultramicroscopy - Volume 146, November 2014, Pages 83-90
نویسندگان
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