کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
8042634 | 1518711 | 2013 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Investigation of ion beam induced radiation damage in Si PN diodes
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
سطوح، پوششها و فیلمها
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چکیده انگلیسی
Ion Beam Induced Charge (IBIC) and Deep Level Transient Spectroscopy (DLTS) were used to investigate displacement damage caused by MeV energy ion beams in Si diodes. The devices were irradiated with 3Â MeV Si ions to create displacement damage and a 2Â MeV He ion beam was used for IBIC. The IBIC signal deterioration was measured as the function of the ion fluence and DLTS was used to identify the defects and their quantities. We used a new calculation method based on previous work by Fizzotti et al. [9] and more recently by Vittone [10] to determine the fraction of the active traps that affect the lifetime. The first application of this method is presented in this paper.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 306, 1 July 2013, Pages 176-180
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 306, 1 July 2013, Pages 176-180
نویسندگان
G. Vizkelethy, R.M. Fleming, E. Bielejec,