کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
8148646 | 1524341 | 2018 | 6 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Growth temperature optimization of GaAs-based In0.83Ga0.17As on InxAl1âxAs buffers
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
فیزیک و نجوم
فیزیک ماده چگال
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چکیده انگلیسی
Improved quality of gas source molecular beam epitaxy grown In0.83Ga0.17As layer on GaAs substrate was achieved by adopting a two-step InxAl1âxAs metamorphic buffer at different temperatures. With a high-temperature In0.83Al0.17As template following a low-temperature composition continuously graded InxAl1âxAs (xâ¯=â¯0.05-0.86) buffer, better structural, optical and electrical properties of succeeding In0.83Ga0.17As were confirmed by atomic force microscopy, photoluminescence and Hall-effect measurements. Cross-sectional transmission electron microscopy revealed significant effect of the two-step temperature grown InAlAs buffer layers on the inhibition of threading dislocations due to the deposition of high density nuclei on GaAs substrate at the low growth temperature. The limited reduction for the dark current of GaAs-based In0.83Ga0.17As photodetectors on the two-step temperature grown InxAl1âxAs buffer layers was ascribed to the contribution of impurities caused by the low growth temperature of InAlAs buffers.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of Crystal Growth - Volume 488, 15 April 2018, Pages 51-56
Journal: Journal of Crystal Growth - Volume 488, 15 April 2018, Pages 51-56
نویسندگان
X.Y. Chen, Y. Gu, Y.G. Zhang, Y.J. Ma, B. Du, J. Zhang, W.Y. Ji, Y.H. Shi, Y. Zhu,