کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
8175289 | 1526361 | 2014 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Update on scribe-cleave-passivate (SCP) slim edge technology for silicon sensors: Automated processing and radiation resistance
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
فیزیک و نجوم
ابزار دقیق
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Update on scribe-cleave-passivate (SCP) slim edge technology for silicon sensors: Automated processing and radiation resistance Update on scribe-cleave-passivate (SCP) slim edge technology for silicon sensors: Automated processing and radiation resistance](/preview/png/8175289.png)
چکیده انگلیسی
We pursue scribe-cleave-passivate (SCP) technology for making “slim edge” sensors. The goal is to reduce the inactive region at the periphery of the devices while maintaining their performance. In this paper we report on two aspects of the current efforts. The first one involves fabrication options for mass production. We describe the automated cleaving tests and a simplified version of SCP post-processing of n-type devices. Another aspect is the radiation resistance of the passivation. We report on the radiation tests of n- and p-type devices with protons and neutrons.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment - Volume 765, 21 November 2014, Pages 59-63
Journal: Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment - Volume 765, 21 November 2014, Pages 59-63
نویسندگان
V. Fadeyev, S. Ely, Z. Galloway, J. Ngo, C. Parker, H.F.-W. Sadrozinski, M. Christophersen, B.F. Phlips, G. Pellegrini, J.M. Rafi, D. Quirion, G.-F. Dalla Betta, M. Boscardin, G. Casse, I. Gorelov, M. Hoeferkamp, J. Metcalfe, S. Seidel, J.V. Vaitkus,