Extended AMAI-PCA technique based on multi-level Box–Behnken design

Previously, we reported a technique for in situ projection lens aberration measurement based on principal component analysis of aerial images (AMAI-PCA). The sampling approach of this technique has a great impact on the measurement range and accuracy. To meet the requirement of large aberration measurement, a multi-level Box–Behnken design approach is tested in conjunction with AMAI-PCA to build the aerial image space. Compared with regular Box–Behnken design, the new approach improves the accuracy by 30% when the amplitude of wavefront aberration is larger than 0.1λ.