کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
9595207 | 1507970 | 2005 | 8 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Structural ordering of ultra-thin, amorphous aluminium-oxide films
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
شیمی تئوریک و عملی
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Structural ordering of ultra-thin, amorphous aluminium-oxide films Structural ordering of ultra-thin, amorphous aluminium-oxide films](/preview/png/9595207.png)
چکیده انگلیسی
The structural ordering of ultra-thin (<5 nm) Al-oxide films, as grown by dry, thermal oxidation for various oxidation times within the temperature range of 373-773 K, has been investigated by chemical state analysis using X-ray photoelectron spectroscopy (XPS). To this end, the changes in chemical environment of the Al and O ions in the oxide film during the transformation from amorphous Al-oxide to γ-Al2O3 with increasing oxidation temperature and oxide-film thickness has been deduced from the corresponding shifts of the Al and O Auger parameters. It is concluded that the transition from amorphous Al-oxide to γ-Al2O3 is realised by a gradual development of long-range order in the dense-random-packing-of-spheres network of oxygen ions, accompanied by a densification of the oxide film. During the transformation, neither a significant short-range ordering of Al cations nor a redistribution of Al cations over tetrahedral and octahedral interstices of the oxygen sublattice is observed.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Surface Science - Volume 589, Issues 1â3, 1 September 2005, Pages 98-105
Journal: Surface Science - Volume 589, Issues 1â3, 1 September 2005, Pages 98-105
نویسندگان
P.C. Snijders, L.P.H. Jeurgens, W.G. Sloof,