Infrared lensless holographic microscope with a vidicon camera for inspection of metallic evaporations on silicon wafers

The lensless digital in-line microscope is proposed as a simple tool for post-production inspection of metallic film patterns on silicon wafers. Transmission holographic imaging is achieved by using a superluminescent diode emitting in the near infrared coupled into a single-mode high numerical aperture optical fiber and an infrared vidicon camera. Images of 300 nm thick vapor-deposited aluminum bolometers are presented.