کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
9803863 | 1516474 | 2005 | 4 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Thickness dependent structure of β-FeSi2 grown on silicon by solid phase epitaxy
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موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فلزات و آلیاژها
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چکیده انگلیسی
Semiconducting β-FeSi2 was grown on Si(0 0 1) substrates by depositing Fe layers of thickness 2, 4 and 6 nm at room temperature in an ultra-high vacuum system and subsequent in situ annealing at 600 °C for 15 min. The phase of the grown polycrystalline β-FeSi2 was confirmed by electron diffraction and infrared reflectance measurements. Transmission electron microscopy analysis has shown that the structure of the formed β-FeSi2 is thickness dependent. For an Fe layer of thickness 2 nm, β-FeSi2 nanodots with a mean diameter of about 15 nm were grown, together with islands of irregular shape and linear or S-type arrays of β-FeSi2 nanodots. For thicker Fe layers, the grown β-FeSi2 consisted of continuous polycrystalline layers.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of Alloys and Compounds - Volume 393, Issues 1â2, 3 May 2005, Pages 167-170
Journal: Journal of Alloys and Compounds - Volume 393, Issues 1â2, 3 May 2005, Pages 167-170
نویسندگان
N. Vouroutzis, T.T. Zorba, C.A. Dimitriadis, K.M. Paraskevopoulos, L. Dózsa, G. Molnár,