Mechanical properties of carbon-doped TIN films by ion beam irradiation in ethylene gas atmosphere

From the XPS measurement, the doped carbon resulted in Gaussian-like carbon depth profiles with a maximum concentration of 40 at.%, and in the formation of titanium carbide and graphite in the surface of TiN film. Carbon-doped TiN films exhibit higher hardness value of 2300-2550 kgf/mm2 and a low friction coefficient of 0.15 in comparison with TiN film. From these measurements of XPS, XRD and mechanical properties, it was clear that mechanical properties for carbon-doped TiN were affected by concentration and chemical state of carbon in the surface layer of TiN.