Studies of the discharge properties of unbalanced magnetron sputtering system

In this paper, an unbalanced magnetron sputtering system was set up using a conventional magnetron and a coaxial electro-solenoid. The discharge properties were experimentally investigated. The model of the voltage-current (V-I) property of the unbalanced magnetron sputtering (UBM) system was developed. The comparisons of the simulation with the experimental data indicated that the model expressed the discharge properties of the UBM sputtering system correctly.