کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
9816881 | 1518375 | 2005 | 7 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
System errors quantitative analysis of sample-scanning AFM
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موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فناوری نانو (نانو تکنولوژی)
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
During imaging or nanomanipulation with a sample-scanning AFM, two important errors, scanning size error and vertical cross coupling error, will be generated due to bend motion of the tube scanner, and these two errors are destructive to nanostructures quantitative analysis. To minimize the errors, a kinematics model of the scanner is presented, and according to the model the two errors are quantitatively analyzed, which shows that scanning size error is greatly affected by sample thickness and nominal scanning size, while vertical cross coupling error is greatly affected by probe tip offset to tube axis and nominal scanning size. Corresponding methods are proposed for minimizing the errors. Gratings imaging experiments verify the kinematics model and errors calculation formulas.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Ultramicroscopy - Volume 105, Issues 1â4, November 2005, Pages 336-342
Journal: Ultramicroscopy - Volume 105, Issues 1â4, November 2005, Pages 336-342
نویسندگان
Xiaojun Tian, Ning Xi, Zaili Dong, Yuechao Wang,