Development of focused ion beam systems with various ion species

Conventional focused ion beam systems employ a liquid-metal ion source (LMIS) to generate high-brightness beams, such as Ga+ beams. Recently there has been an increased need for focused ion beams in areas like biological studies, advanced magnetic-film manufacturing and secondary-ion mass spectroscopy (SIMS). In this article, status of development on focused ion beam systems with ion species such as O2+, P+, and B+ will be reviewed. Compact columns for forming focused ion beams from low energy (∼3 keV), to intermediate energy (∼35 keV) are discussed. By using focused ion beams, a SOI MOSFET is fabricated entirely without any masks or resist.