کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
9818137 1518776 2005 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Effect of ion irradiation on the evolution of Pt film morphology
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سطوح، پوشش‌ها و فیلم‌ها
پیش نمایش صفحه اول مقاله
Effect of ion irradiation on the evolution of Pt film morphology
چکیده انگلیسی
Atomic force microscopy (AFM) and X-ray diffraction (XRD) analysis have been used to characterize ion-irradiated-and-annealed surface structures of Pt thin films deposited on SiO2 glass substrates. The surface morphology of the Pt films is found to be strongly dependent on ion irradiation conditions. A Pt film composed of grains of approximately 1 μm diameter with a smooth surface is successfully prepared by an appropriate combination of ion irradiation and annealing. The Pt film shows a preferential (1 1 1) orientation parallel to the substrate surface.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 232, Issues 1–4, May 2005, Pages 348-352
نویسندگان
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