کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
9830242 | 1524505 | 2005 | 6 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Structural characteristics of SrTiO3 thin films processed by rapid thermal annealing
دانلود مقاله + سفارش ترجمه
دانلود مقاله ISI انگلیسی
رایگان برای ایرانیان
کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
فیزیک و نجوم
فیزیک ماده چگال
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
The amorphous SrTiO3 (STO) thin films prepared on Si (1Â 1Â 1) substrates by pulsed laser deposition (PLD) deposition were crystallized at different temperatures for various annealing time using rapid thermal annealing (RTA) process. Grazing incidence X-ray diffraction and atomic force microscopy were applied to investigate the crystallinity and surface morphology of annealed STO thin films. The results showed that the formation of STO crystalline phase was strongly dependent on the annealing temperature, and the increase of annealing temperature led to an improvement in the crystalline quality. However, at a certain annealing temperature, though the crystalline quality and surface morphology could be improved with increasing annealing time, the grain growth showed a saturation of grain size which was independent on the annealing time. Moreover, with increasing temperature, the saturated grain size decreased at lower temperatures while increased slightly at higher temperatures. A phenomenological assumption had been introduced to explain the experimental observations.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of Crystal Growth - Volume 274, Issues 3â4, 1 February 2005, Pages 500-505
Journal: Journal of Crystal Growth - Volume 274, Issues 3â4, 1 February 2005, Pages 500-505
نویسندگان
S.W. Jiang, Q.Y. Zhang, Y.R. Li, Y. Zhang, X.F. Sun, B. Jiang,